Nikon NEXIV VMR-K3040ZC - Automated Measuring Systems - Measuring

Nikon’s Confocal NEXIV VMR-K3040ZC addresses the metrology needs of complex IC packages resulting from the enormous demand for reliable semiconductor products. The Confocal NEXIV features a new optical measuring head using confocal capabilities to solve the problem of Z-series measurement. This head supports a micron-level measuring capability, and has been optimized for semiconductor measuring by stressing low distortion to optimize the entire field of view.

Confocal Objective Lenses

Confocal Objective Lenses: 1.5x - W.D. 24mm, 3x - W.D. 24mm, 7.5x - W.D. 24mm

Advanced Image Processing

Advanced image processing enhances contrast and fidelity with powerful edge detection to ensure accuracy and repeatability.

Height Measurement

Fast, confocal high precision height measurement 0.35 at 2 sigma in 1.5 second cycle time.

Automeasure Software

New, easy-to-program, versatile VMR Automeasure software includes CAD reader, offline programming, profiling software and programming wizards.

Defect-free Progressive B/W CCD

Faster image acquisition and system speed with selected defect-free instrument grade progressive scan black and white CCD camera.

Ideal Applications

Ideal for measuring micro-dimensional 2D and 3D workpieces, all requiring exceptionally high accuracy. Examples include bump heights on advanced IC packages, MEMS, probe card, micro lens, contact lenses, photo spacers for color FPD panel, molds and others.

Confocal Technology Advantages

Widely used in bio-science research, confocal microscopy offers several advantages over conventional optical microscopy, including controllable depth of field, the elimination of image degrading out-of-focus information, and the ability to collect serial optical sections from material samples. The key to the confocal approach is the use of spatial filtering to eliminate flare in material sample images. The Nikon Confocal NEXIV uses a Nipkow disk, which features multiple, symmetrically placed spirals of pinhole apertures through which light is passed and split into mini-beams. As the disk rotates, each beam scans across a portion of the sample field and generates a 3D image. The image is projected into a digital CCD camera using optical sectioning technology. The result is a 3D image captured in one scan delivering highly accurate and reliable height measurement data.

Advanced Optics

Advanced Nikon optics provide superior images for improved repeatability and accuracy.

Telecentric Zoom

5-step 15x telecentric zoom (15:1) magnification to cover different fields of view and resolution requirements.

300 x 400 x 150mm Stage

Fast, accurate and durable - 300 X, 400Y mm travel with cast Mehanite stage with 150mm Z.

Improved Stage Accuracy

Improved stage accuracy with new lower coefficient of expansion 0.1µm resolution scales.

Large Diameter Ballscrew

Precision ground large diameter ballscrew with DC servo motors for high speed and stiffness.

TTL Laser Autofocus

Vision and TTL laser autofocus. High speed through-the-lens laser scans 1000 points/sec. with 0.5µm Z accuracy at 2 sigma.

Stage Stroke (Xx Yy Zz) (Standard)	300 x 400 x 150mm (11.8 x 15.8x 5.9 in)
Minimum Readout	0.1 µm
Maximum Work Piece Weight	20kg (44.0 lb)
Measuring Accuracy at 20C ±0.5K: U1x U1y	1.5 + 4L/1000 µm
Measuring Accuracy at 20C ±0.5K: U2xy (Standard):	2.5 + 4L/1000 µm
Z-axis Guide Accuracy	(1.5+L/150) µm
Camera	B/W Progressive Scan camera
Maximum Specimen Height (Standard)	150mm
Objective 1.5x	W.D. 24mm, FOV 8 x 6mm to 0.53 x 0.4mm, Z measurement @ 2 sigma 0.6µm
Objective 3x	W.D. 24mm, FOV 4 x 3mm to 0.27 x 0.2mm, Z measurement @ 2 sigma 0.35µm
Objective 7.5x	W.D. 24mm, FOV 1.6 x 1.2 mm to 0.11 x 0.08mm, Z measurement @ 2 sigma 0.25µm
Auto Focus	TTL Through the lens laser and video auto focus
Power Source	AC 100 to 240 V ±10%, 50/60 Hz
Power Consumption	Approximately 13A
Dimensions and Weight Main Body and Table	1150(W) x 1250(D) x 1980(H) mm, 900kg; 51.1 (W) x 49.2(D) x 80(H) in., 1980 lb
Dimensions and Weight Controller	250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19.7(H) in., 44.1lb
Footprint	2200(W) x 1250(D) mm; 87(W) x 49.2(D) in; estimate of main unit & computer table
Host Computer Main Unit	Pentium 4 (Windows® 2000/XP)
Host Computer Monitor	19-inch LCD flat panel (standard for USA)
CE (Low Voltage/ EMC/ Laser)	(LEFT BLANK ON WEBSITE)