Higher speeds and greater precision than ever before.
Magnification, AF and illumination conditions can be finely adjusted for each specimen. VMZ-R3020 offers a 300 x 200 mm stroke suitable for measurement of small components such as mechanical parts, molded parts and high-density PCBs.
- Six Types of Optical Zooming Head
- Detection of 0.1 mm Transparent Layer
- 8-segment Ring Illumination with Three Incident Angles
- Measuring Accuracy is Further Improved
- Faster Throughput
- 15x High-speed Zoom
Six Types of Optical Zooming Head
Standard magnification zooming heads: type 1 - 3
Standard magnification zooming heads
Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.
High magnification zooming heads: type 4, TZ
High magnification zooming heads
Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.
Wide field-of-view zooming head: type A
Wide field-of-view zooming head
Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.
8-segment Ring Illumination with Three Incident Angles
Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.
High rate of data transfer combined with fast illumination control provides faster throughput.
|Stroke (X x Y x Z)||
300 x 200 x 200 mm (11.8 x 7.8 x 7.8 in.) 250 x 200 x 200 mm (9.8 x 7.8 x 7.8 in.) (with type TZ at low magnification)
|Maximum Workpiece Weight||
20 kg (44.1 lb.)
EUX, MPE EUY, MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
|Z Measurement Uncertainty||
EUZ, MPE: 1.2+5L/1000 μm (with Laser AF)
Black & white 1/3” CCD, color 1/3” CCD (option)*
* For type 1, 2 and A only
Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF)
|Magnification vs. Field of View||
Type 1: 0.5 - 7.5x / 9.33 x 7 - 0.622 x 0.467 mm Type 2: 1 - 15x / 4.67 x 3.5 - 0.311 x 0.233 mm Type 3: 2 - 30x / 2.33 x 1.75 - 0.155 x 0.117 mm
Type 4: 4 - 60x / 1.165 x 0.875 - 0.07 x 0.068 mm Type TZ: 1 - 120x / 4.67 x 3.5 - 0.039 x 0.029 mm Type A: 0.35 - 3.5x / 13.3 x 10 - 1.33 x 1 mm
Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option.
Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring) Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
AC 100-240V 50/60Hz
|Dimensions & Weight (W x D x H)||
Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
2100 x 1100 mm